| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method for continuously performing the measurement of the concentration of a F<SB>2</SB>gas impossible heretofore in a short time by measuring the absorbancy of ultraviolet rays, and a measuring instrument therefor. SOLUTION: A gas cell filled with the F<SB>2</SB>gas is irradiated with ultraviolet rays to measure an absorption spectrum. The gas cell is a cylindrical member equipped with at least one air ventilation pipe and has windows, and the cylindrical member comprises at least one kind of a crystal selected from crystals of CaF<SB>2</SB>, MgF<SB>2</SB>, BaF<SB>2</SB>, LiF and SiO<SB>2</SB>at both ends thereof and comprises either one of stainless steel, iron, aluminum, an aluminum alloy, nickel, a neckel alloy, copper, aluminum oxide and aluminum nitride. Further, hydrogen fluoride or hydrofluoric acid is removed as pretreatment by an NaF adsorbing pipe or a deep cold trap. An apparatus using the gas cell equipped with a gas passing pipe at least comprising the cylindrical member is also disclosed. COPYRIGHT: (C)2005,JPO&NCIPI
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