| 摘要 |
PROBLEM TO BE SOLVED: To provide an operation method of ions and/or atoms in solid, for dispensing with the formation of a mask such as in a heat diffusing method and an ion implantation method, by forming a heterogeneous microscopic area with resolution of a scanning type probe microscope in an optional place and the optional size in the vicinity of a solid surface, by introducing the ion and the atom into the solid or extracting the ion and the atom from the solid, in the microscopic area. SOLUTION: This operation method of ions and/or atoms in solid is characterized by forming the microscopic area different in the composition in the vicinity of the solid surface by moving ions and/or atoms in solid to the solid surface from the solid inside or to the solid inside from the solid surface, by impressing an electric field between counter electrodes by contacting a fine electrode with the solid surface. COPYRIGHT: (C)2005,JPO&NCIPI
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