MEMS flow module with filtration and pressure regulation capabilities

摘要

Various embodiments of MEMS flow modules that both filter and regulate pressure are disclosed. One such MEMS flow module ( 58 ) has a tuning element ( 78 ) and a lower plate ( 70 ). A plurality of springs or spring-like structures ( 82 ) interconnect the tuning element ( 78 ) with the lower plate ( 70 ) in a manner that allows the tuning element ( 78 ) to move either toward or away from the lower plate ( 70 ), depending upon the pressure being exerted on the tuning element ( 78 ) by a flow through a lower flow port ( 74 ) on the lower plate ( 70 ). The tuning element ( 78 ) is disposed over this lower flow port ( 74 ) to induce a flow through the MEMS flow module ( 58 ) along a non-linear (geometrically) flow path. Preferably, a relatively small change in the pressure exerted by this flow on the tuning element ( 78 ) produces greater than a linear change in the flow rate out of the MEMS flow module ( 58 ).