AUTOMATIC PROCESSING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To observe the situation of the surface of a glass substrate even in processing by automatic processing equipment, and to facilitate the detachment operation of the glass substrate. SOLUTION: An LED having a light emitting wavelength outside a photosensitive wavelength region is assembled in the automatic processing equipment as an illuminator. An LED illuminator 1 is installed near a glass detachment jig 3, and an LED illuminator 2 is installed near each processing tub 4. COPYRIGHT: (C)2005,JPO&NCIPI