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发明名称
STABILIZATION OF ELECTRONEGATIVE PLASMAS WITH FEEDBACK CONTROL OF RF GENERATOR SYSTEMS
摘要
申请公布号
JP2005527096(A)
申请公布日期
2005.09.08
申请号
JP20040514110
申请日期
2003.05.14
申请人
发明人
分类号
H05H1/00;C23F4/00;H01J37/32;H05H1/46;(IPC1-7):H05H1/00
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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