发明名称 In-situ metalization monitoring using eddy current measurements during the process for removing the film
摘要 A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
申请公布号 US2005194971(A1) 申请公布日期 2005.09.08
申请号 US20050115835 申请日期 2005.04.26
申请人 KLA-TENCOR CORPORATION 发明人 LEHMAN KURT R.;LEE SHING M.;JOHNSON WALTER H.III;FIELDEN JOHN
分类号 G01N27/72;(IPC1-7):G01B7/06 主分类号 G01N27/72
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