| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem that it is difficult to obtain gradient force as large suction force even if a high voltage is applied, and sufficient suction force can not be obtained even if an insulative substrate is sucked since the insulative substrate such as a liquid crystal substrate is not electrically conductive like a conductor or a semiconductor such as a silicon wafer used for a semiconductor substrate. SOLUTION: In an electrostatic chuck formed with an insulative layer for covering an upper face of an adsorptive electrode, the suction electrode comprises a plurality of suction electrodes, a density of intermediate lines at an equal distance from the adsorptive electrodes is 100-5,000/m in a region in which independent adsorptive electrodes face each other, and a withstand voltage between the adsorptive electrodes is≥2 kV. COPYRIGHT: (C)2005,JPO&NCIPI |
