| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of contacting the contact shoes with inspection points surely at the time of inspection while suppressing the increase in cost. SOLUTION: A misalignment detection part detects the center of correction mark using each contact shoe (# 12, #13), derives the necessary driving vector for positioning each contact shoe to the center from the detected center, and detects the misalignment with the driving vector of the contact shoe in the memory part (# 14). The misalignment detection part makes a camera photograph the correction mark, makes detect the center lines (# 15), deduces the driving vector necessary to drive the position of the camera so as to pass the light axis pass through the center (# 16). A driving data correction process part corrects the driving data for each contact shoe in the memory for making each contact shoe contact to the pad based on the detected misalignment (# 17). COPYRIGHT: (C)2005,JPO&NCIPI
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