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经营范围
发明名称
FILM FORMING DEVICE
摘要
申请公布号
EP1371751(A4)
申请公布日期
2005.09.07
申请号
EP20020711435
申请日期
2002.02.08
申请人
TOKYO ELECTRON LIMITED
发明人
KASAI, SHIGERU;KAKEGAWA, TAKASHI
分类号
C23C16/44;C23C16/455;H01J37/32;H01L21/285;(IPC1-7):H01L21/285
主分类号
C23C16/44
代理机构
代理人
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地址
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