发明名称 |
Micromachined moving device controlled by a varying-amplitude AC drive signal |
摘要 |
A micromachined moving device which has a fixed electrode base plate 8 and a moving electrode plate 2 supported by a support frame 10 through anchor parts 23 and flexures 21 and held at a predetermined distance from the fixed electrode base plate 8 , in which an AC drive voltage from an AC drive circuit 60 is applied across the fixed electrode base plate 8 and the moving electrode plate 2 so to drive by the electrostatic force into contact with the former and hold them in contact.
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申请公布号 |
US6940207(B2) |
申请公布日期 |
2005.09.06 |
申请号 |
US20030627392 |
申请日期 |
2003.07.25 |
申请人 |
JAPAN AVIATION ELECTRONICS INDUSTRY LIMITED |
发明人 |
KATO YOSHICHIKA |
分类号 |
G02B26/00;B81B3/00;H02N1/00;(IPC1-7):H02N1/00;G02B26/08;G02B26/10 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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