发明名称 |
Diffusion bonding method for microchannel plates |
摘要 |
A microchannel plate (MCP) ( 50 ) and a dielectric insulator ( 80 ) are deposited with a thin film ( 54, 84 ) using a suitable metal selected for optimum diffusion. The metallized MCP ( 50 ) and dielectric insulator ( 80 ) are then aligned and placed in a bonding fixture ( 36 ) that provides the necessary force applied to the components to initiate a diffusion bond. The bonding fixture ( 36 ) is then placed in a vacuum heat chamber to accelerate the diffusion bonding process between the MCP ( 50 ) and the dielectric insulator ( 80 ).
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申请公布号 |
US6938817(B2) |
申请公布日期 |
2005.09.06 |
申请号 |
US20040708889 |
申请日期 |
2004.03.30 |
申请人 |
LITTON SYSTEMS, INC. |
发明人 |
SALDANA MIGUEL M.;TUCKER JAY SCOTT;IOSUE MICHAEL J. |
分类号 |
B23K20/00;B23K31/00;H01J9/12;H01J31/50;H01L;H01L21/00;H04N5/225;H04N5/74;(IPC1-7):B23K20/00 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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