发明名称 Diffusion bonding method for microchannel plates
摘要 A microchannel plate (MCP) ( 50 ) and a dielectric insulator ( 80 ) are deposited with a thin film ( 54, 84 ) using a suitable metal selected for optimum diffusion. The metallized MCP ( 50 ) and dielectric insulator ( 80 ) are then aligned and placed in a bonding fixture ( 36 ) that provides the necessary force applied to the components to initiate a diffusion bond. The bonding fixture ( 36 ) is then placed in a vacuum heat chamber to accelerate the diffusion bonding process between the MCP ( 50 ) and the dielectric insulator ( 80 ).
申请公布号 US6938817(B2) 申请公布日期 2005.09.06
申请号 US20040708889 申请日期 2004.03.30
申请人 LITTON SYSTEMS, INC. 发明人 SALDANA MIGUEL M.;TUCKER JAY SCOTT;IOSUE MICHAEL J.
分类号 B23K20/00;B23K31/00;H01J9/12;H01J31/50;H01L;H01L21/00;H04N5/225;H04N5/74;(IPC1-7):B23K20/00 主分类号 B23K20/00
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