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发明名称
Interferometrisches Verfahren für ellipsometrische, reflektometrische und streulichtanalytische Messungen, einschließlich der Charakterisierung von Dünnfilmstrukturen
摘要
申请公布号
DE10393244(T5)
申请公布日期
2005.09.01
申请号
DE2003193244T
申请日期
2003.09.09
申请人
ZYGO CORP., MIDDLEFIELD
发明人
GROOT, PETER J.
分类号
G01B9/02;G01B11/06;G01N21/00;G01N21/21;G01N21/45;(IPC1-7):G01B11/06
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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