发明名称 |
Ellipsometric measurement with Region Of Interest-supported image correction involves correcting second image so ROI positions and/or shapes coincide in two images, processing corresponding image points/regions to produce resulting image |
摘要 |
The method involves acquiring successive images each representing at least part of an object under different ellipsometrically relevant conditions, storing in a digital memory unit and processing according to defined rules to produce a resulting image or value. It involves defining a region of interest or ROI in a reference image using imago information parameters and determining its position and/or shape in first and second single images, correcting the second image so that the positions and/or shapes of the ROIs coincide in the two images and processing corresponding image points and/or regions to produce the resulting image. |
申请公布号 |
DE102004012125(B3) |
申请公布日期 |
2005.09.01 |
申请号 |
DE20041012125 |
申请日期 |
2004.03.12 |
申请人 |
NANOFILM TECHNOLOGIE GMBH |
发明人 |
HOENIG, DIRK;STURM, KAI |
分类号 |
G01N21/21;G06T7/00 |
主分类号 |
G01N21/21 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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