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发明名称
PROBE STATION WITH LOW INDUCTANCE PATH
摘要
申请公布号
EP1567871(A2)
申请公布日期
2005.08.31
申请号
EP20030777879
申请日期
2003.10.24
申请人
CASCADE MICROTECH, INC.
发明人
DUNKLEE, JOHN;COWAN, CLARENCE, E.
分类号
G01R31/28;(IPC1-7):G01R31/02
主分类号
G01R31/28
代理机构
代理人
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地址
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