| 摘要 |
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen ( 14 ). The column is constituted by, among other things, a charged particle source ( 2 ) for providing a beam of charged particles ( 10 ); a lens system for guiding the beam of charged particles ( 10 ) from the source ( 2 ) onto the specimen ( 14 ); and a housing ( 40 ) which, during operation, is set on beam boost potential.
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