| 发明名称 |
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods |
| 摘要 |
To calibrate a front-to-backside alignment system a transparent calibration substrate with reference markers on opposite sides is used. A plane plate is inserted to displace the focal position of the alignment system from the top to bottom surface of the calibration substrate.
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| 申请公布号 |
US6936385(B2) |
申请公布日期 |
2005.08.30 |
| 申请号 |
US20030374510 |
申请日期 |
2003.02.27 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LOF JOERI;VAN BUEL HENRICUS WILHELMUS MARIA;GUI CHENG-QUN;BIJNEN FRANSISCUS GODEFRIDUS CASPER |
| 分类号 |
G03F9/02;G03F9/00;H01L21/027;(IPC1-7):G03F9/00;G03C5/00;G01B11/00;G03B27/42 |
主分类号 |
G03F9/02 |
| 代理机构 |
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代理人 |
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