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发明名称
WET TIME ETCHING
摘要
申请公布号
SG113449(A1)
申请公布日期
2005.08.29
申请号
SG20030000697
申请日期
2003.02.21
申请人
SENSFAB PTE LTD
发明人
ARNOLD BACAL CORRALES;ONG KOK MENG;KATHIRGAMASUNDARAM SOORIAKUMAR;CHONG WAI MUN
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
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