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发明名称
T-GATE FORMATION
摘要
申请公布号
SG113599(A1)
申请公布日期
2005.08.29
申请号
SG20050000492
申请日期
2005.01.28
申请人
ROHM AND HAAS ELECTRONIC MATERIALS LLC;ASML NETHERLANDS B.V.
发明人
FRANK LINSKENS;RUDY PELLENS
分类号
H01L21/28;H01L21/285;H01L21/338;H01L29/417;H01L29/78;H01L29/812
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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