A TWO-DIMESIONAL LENGTH MEASURING DEVICE USING COMBINED OPTICAL AND X-RAY INTERFEROMETER,申请号KR20040011952-传众专利搜索

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发明名称	A TWO-DIMESIONAL LENGTH MEASURING DEVICE USING COMBINED OPTICAL AND X-RAY INTERFEROMETER
摘要
申请公布号	KR20050083437(A)	申请公布日期	2005.08.26
申请号	KR20040011952	申请日期	2004.02.23
申请人	KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIEBCE	发明人	PARK, JIN WON;UM, CHUN IL
分类号	G01B11/04;(IPC1-7):G01B11/04	主分类号	G01B11/04
代理机构		代理人
主权项
地址

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