| 摘要 |
PROBLEM TO BE SOLVED: To fully cool both a driving portion and power supply lines, while reducing weight by well arranging the power supply lines, does not cause the occurrence of an excessive load, and preventing adverse effects on other devices inside a vacuum processing chamber, when an electric motor is used inside a vacuum processing chamber. SOLUTION: A driving portion 5 provided on either a stator or a mover 4 is sufficiently cooled by a cooling fluid that flows in a cooling container 6, by being stored in the cooling container 6. At the same time, a power supply line 11 that supplies electric power to the driving portion 5 is fully cooled by the cooling fluid that flows inside a cooling pipe 12c, by passing the line 11 through the cooling pipe 12c connected to the cooling container 6 to flow the cooling fluid, eliminating the need for the diameter of the line 11 to be large, and a gas and dynamic magnetic field that are generated from the line 11 are shut out to the outside, by constituting the cooling pipe 12c of a metal pipe or a pipe covered with a metal film. COPYRIGHT: (C)2005,JPO&NCIPI |
