| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam tube which can maintain its sufficient strength and can prevent a window member from fracturing by suppressing the rise in temperature even if the output of an electron beam is heightened by using silicon of high thermal conductivity for an electron beam transmissive window. SOLUTION: In this electron beam tube, the window member for transmitting the electron beam is made of silicon containing atoms of the 3B family or the 5B family and is so constituted that the number of the atomicity of the 3B family or the 5B family is 1×10<SP>19</SP>atomicity/cm<SP>3</SP>or less. COPYRIGHT: (C)2005,JPO&NCIPI
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