发明名称 Illumination apparatus and exposure apparatus
摘要 An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.
申请公布号 US2005185165(A1) 申请公布日期 2005.08.25
申请号 US20050062024 申请日期 2005.02.18
申请人 WATANABE YUTAKA 发明人 WATANABE YUTAKA
分类号 G21K1/06;G02B19/00;G03B27/54;G03F7/20;G21K5/00;G21K5/02;H01L21/027;(IPC1-7):G03B27/54 主分类号 G21K1/06
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