发明名称 TERAHERTZ LIGHT MEASURING INSTRUMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a terahertz light measuring instrument for reducing an instrument cost and decreasing an installation area for the instrument. <P>SOLUTION: This terahertz light measuring instrument 100 is equipped with: a light transmission antenna 3 for radiating terahertz pulse light T1 having a polarized component; a wire grid 5 switchable among a case where the pulse light T1 is guided to a transmission measurement specimen S1, a case where it is guided to a reflection measurement specimen S2, and a case where it is guided to both the specimens S1 and S2; a transmitted-light detector 8 for detecting terahertz pulse light T4 transmitted by the specimen S1 with the antenna directed in the polarization direction thereof; and a reflected-light detector 13 for detecting terahertz pulse light T5 reflected from the specimen S2 with the antenna directed in the polarization direction thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005227021(A) 申请公布日期 2005.08.25
申请号 JP20040033643 申请日期 2004.02.10
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 TSUMURA NAOKI
分类号 G01N21/35;G01N21/21;G01N21/3563;G01N21/3586;(IPC1-7):G01N21/35 主分类号 G01N21/35
代理机构 代理人
主权项
地址