| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a magnetic prism array improved for use for an electron beam inspection device or the like. <P>SOLUTION: A device (100) for inspecting a substrate with the use of charged particles includes irradiation optics, objective optics (104), a projection optics (106), and a beam separator (108). The beam separator (108) is so structured to receive incident beams from the irradiation optical system and bend the incident beams toward the objective optical system, as well as to receive scattered beams from the objective optical system and bend the scattered beams toward the projection optical system. The beam separator (108) consists of a magnetic prism array (202) including a central magnetic sector (204), inside magnetic sectors (206) located outside the center magnetic sector (204), and outside magnetic sectors (208) located outside the inside magnetic sector. Each of the inside and outside sectors can be structured to have field strength independently adjustable for alignment and focusing purposes. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
