| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time required for acquiring a sample while maintaining the image quality of the whole sample to acquire. SOLUTION: A stage driving part 106 moves a stage 105 in the direction of the optical axis of an objective lens 104 to vary the distance between the sample mounted on the stage 105 and the objective lens 104 with a 1st varying speed. A photoelectric conversion part 111 detects a light quantity of the light coming to the objective lens 104 when irradiating the sample with laser light from the objective lens 104 while making a two-dimensional scan unit 103 scan the sample with the laser light two-dimensionally. When this light quantity is a predetermined value or higher, a computer 101 controls the stage driving part 106 so as to reduce the speed to vary the distance between the sample and the objective lens 104 to a 2nd varying speed slower than the 1st varying speed, and produces a stereoscopic image of the sample based on the light quantity detected by the photoelectric conversion part 111 when this varying speed is made to the 2nd varying speed. COPYRIGHT: (C)2005,JPO&NCIPI
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