| 摘要 |
A solid-state imaging apparatus comprising multiple anti-reflective layers which can improve a smear characteristic while suppressing a dark defect and a method for fabricating the multiple anti-reflective layers are provided. The solid-state imaging apparatus includes a light receiving unit, a charge transfer unit, and multiple anti-reflective layers. The method includes forming a first anti-reflective layer, forming a second anti-reflective layer, forming a photoresist mask, removing the second anti-reflective layer, and removing the first anti-reflective layer.
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