| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a processing device, while providing a flow with the high uniformity to an object to be processed to remove particles effectively. SOLUTION: The processing device comprises a process tub 1 having a liquid inlet 5 at a bottom thereof, a current plate 4 disposed in between a position arranged with an article 2 to be processed and the bottom of the process tub 1, and a dispersion 10 spread so as to coat the liquid inlet 5 between the current plate 4 and the liquid inlet 5. The dispersion 10 contains a facing part 8 opposed to the liquid inlet 5, a surrounding part 6 surrounding a space 20 between the opposing part 8 and the liquid inlet 5, and a collar 7 extending from the lower end of the surrounding part 6 to the outside direction. COPYRIGHT: (C)2005,JPO&NCIPI
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