| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump device capable of preventing a water hammer phenomenon generated inside an ejector when stopping a circulating pump. SOLUTION: The ejector 1, a tank 2 and the circulating pump 3 are connected by a circulating passage 6. A conduit 10 is installed in a suction chamber 8 of the ejector 1. An atmosphere suction valve 9 is installed in the circulating passage 6. An inlet 11 and an outlet 12 are arranged in the atmosphere suction valve 9. When driving the circulating pump 3, atmosphere suction ports 16 and 17 are closed, and when the circulating pump is not driven, the atmosphere suction ports 16 and 17 are opened. When driving of the circulating pump 3 is stopped, since the inside of the ejector 1 is a vacuum state, the water hammer phenomenon is not caused inside the ejector 1 by sucking the atmosphere from the atmosphere suction valve 9. COPYRIGHT: (C)2005,JPO&NCIPI
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