APPARATUS FOR TRANSFERRING ARM A WAFER IN WET STATION,申请号KR20040011039-传众专利搜索

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发明名称	APPARATUS FOR TRANSFERRING ARM A WAFER IN WET STATION
摘要
申请公布号	KR20050082562(A)	申请公布日期	2005.08.24
申请号	KR20040011039	申请日期	2004.02.19
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	YEO, IN JOON;KO, YONG SUN;KIM, KYUNG HYUN;JUN, YONG MYUNG
分类号	H01L21/304;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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