| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an energy and medium connector for a coating device which need not be suited to specified coating chambers individually. <P>SOLUTION: A module has the operation of feeding cooling water, compressed air, process gas, signals, control and cathode power. The module can be moved from one coating chamber to the other coating chamber by a single person in a short period of time along coating lines. Further, the energy connector module can be removed from each coating chamber for maintenance or replacement even without mechanically removing all the connectors. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
