| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet stripper capable of stripping a sheet tightly stuck to a substrate from the substrate with high accuracy without damaging patterns with a simple configuration. SOLUTION: The sheet stripper includes a sheet end clamping means (30) for clamping the end of the sheet (12); moving means (36, 38, 40) for relatively parallel moving the sheet in a stripping direction; a stripping angle holding means (50) for holding the angle to strip the sheet from the substrate constant; and means (52, 54, 56) for moving the stripping angle holding means in parallel with the substrate in synchronization with the moving means. COPYRIGHT: (C)2005,JPO&NCIPI
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