| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measurement device capable of film thickness line profile measurement (multipoint film thickness measurement on a straight line), while moving a measurement object, concerning a measurement object film. SOLUTION: This film thickness measurement device for measurement of the film thickness by utilizing interference of monochromatic light is equipped with an imaging means for imaging an imaging region including regularly reflected light from a measurement point reached at an angle changed according to the position of the imaging region, while the measurement point passes on the line segment-shaped imaging region extending in the conveyance direction of the measurement object, and a processing means for operating a plurality of pairs of angles and brightnesses of the regularly reflected light from the measurement point, and thereby operating the film thickness at the measurement point. COPYRIGHT: (C)2005,JPO&NCIPI
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