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发明名称
Einrichtung in einer Halbleiterfertigungsanlage, insbeosndere für integrierte Schaltungen
摘要
申请公布号
DE19612713(B4)
申请公布日期
2005.08.18
申请号
DE19961012713
申请日期
1996.03.29
申请人
INFINEON TECHNOLOGIES AG
发明人
HAUEIS, NORBERT;EIGENSTETTER, PETER;LEITMEIR, MANFRED;GRAFE, JUERGEN
分类号
G01R31/28;H05K13/00;(IPC1-7):G01R31/26;B07C5/00;B07C5/344;B65B5/00;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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