Method of producing Mn alloy sputtering target and Mn alloy sputtering target produced through the production method

摘要

The provided is a producing technology for an Mn alloy sputtering target having low contents of impurity components such as oxygen, carbon and nitrogen and controlled crystal conformation. The present invention is characterized by the production steps of: adding deoxidant comprising elements having stronger affinity for oxygen than that of Mn to Mn; subjecting the Mn to a deoxidization-melting treatment in a fire-resistant crucible to prepare low-oxygen Mn, in which Mn is melted until oxide of the added deoxidant floats in the Mn molten metal; mixing the low-oxygen Mn with constituent metals of a sputtering target by respective predetermined amounts; adding further the deoxidant to the mixture; vacuum melting the mixture; and subjecting the mixture to a casting treatment.