| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-durability multilayer piezoelectric element, in which the possibility of troubles, e.g. cracking, is reduced over a long term, and to provide its fabrication method. <P>SOLUTION: The multilayer piezoelectric element comprises a multilayer ceramic body 10, where a ceramic layer 11 and an inner electrode layer 12 are formed alternately in layers, and a pair of external electrodes bonded, respectively, to a pair of bonding faces 15 formed on the outer circumferential surface of the multilayer ceramic body 10. The internal electrode layer 12 has a conductive inner electrode part 120 and a setback part 129, where the outer circumferential end part of the inner electrode part 120 is set back farther inwardly from the outer circumferential surface. The multilayer ceramic body 10 has a stress-relaxing part 13 which is easily elastically deformable, as compared with the ceramic layer 11 formed along at least a part of the inner electrode layer 12. The stress relax part 13 is arranged so as to overlap the setback part 129 of any one internal electrode layer 12, in the stacking direction of the multilayer ceramic body 10. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
