| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing device of a top emission type organic EL element wherein deterioration of characteristics because an electronic injection layer formed by a vacuum vapor deposition device contacts the air and is oxidized is prevented, without causing any damage on the electronic injection layer when a transparent conductive film such as an ITO is formed. SOLUTION: This is the manufacturing method of the organic EL device provided with a substrate, an electrode installed on the substrate, a positive hole injection/transportation layer installed on the electrode, a light-emitting layer installed on the positive hole injection/transportation layer, a single layer of organic materials or inorganic materials formed on the light-emitting layer, or the electron injection layer composed of a mixed layer of those, and a transparent electrode layer installed on the electron injection layer. The electron injection layer is formed by the vacuum vapor deposition device, the substrate in which the electron injection layer is formed is put under the vacuum atmosphere and transported, and the transparent electrode layer is formed by an ion-plating device. COPYRIGHT: (C)2005,JPO&NCIPI
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