| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaner and a cleaning method, which eliminate a resist and the scum of the resist without corroding a semiconductor base material. SOLUTION: The semiconductor base substance, such as a copper wiring board, is treated using a cleaner consisting of a aqueous solution, which contains at least (1) any one of 1,8-diazabicyclo[5.4.0]-7-undecene, 1,4-diazabicyclo[2.2.2]octan, and 1,5-diazabicyclo[4.3.0]-5-nonen of 0.01 to 5 wt%, and (2) a water soluble organic solvent of 10 to 80 wt%. COPYRIGHT: (C)2005,JPO&NCIPI
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