| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize an objective lens driving device of a microscope for aligning the wafer and the mask of an electron beam exposure device. SOLUTION: The objective lens 102 of the microscope is held by parallel link mechanisms 134, 135, 136, 137 so that it can be moved in its optical axis direction 112, and driving force is produced in a direction 113 different from the optical axis direction 112 by an actuator 109. This driving force is transmitted to the parallel link mechanisms 134, 135, 136, 137 by link mechanisms 131, 133 capable of rotating with a direction perpendicular to the driving direction and the optical axis direction 112 of this objective lens as an axis of rotation. COPYRIGHT: (C)2005,JPO&NCIPI
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