DEVICE FOR AND METHOD OF DETECTING CHARGED PARTICLE ENERGY, AND METHOD OF MANUFACTURING DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a energy detection device of a charged particle and a manufacturing method which are used for the detection of the energy of the charged particle, such as electron and ion with a very simple, space saving, and economical method. SOLUTION: The energy detection device of the charged particle which is performing the energy measurement of the charged particle, such as electron, ion comprises a plurality of conductor parts 101 and insulator parts 102; and a depth 103 and a depth 104 of the conductor 101 which are different from each other. By the constitution, the energy of the charged particle can be distinguished according to a contrast when observing the conductor 101 by a secondary electron image. COPYRIGHT: (C)2005,JPO&NCIPI