发明名称 |
Non-repeated and non-uniform width seal ring structure |
摘要 |
A method of forming an improved seal ring structure is described. A continuous metal seal ring is formed along a perimeter of a die wherein the metal seal ring is parallel to the edges of the die and sloped at the corner of the die so as not to have a sharp corner and wherein the metal seal ring has a first width at the corners and a second width along the edges wherein the first width is wider than the second width. |
申请公布号 |
US2005179213(A1) |
申请公布日期 |
2005.08.18 |
申请号 |
US20040780512 |
申请日期 |
2004.02.17 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO. |
发明人 |
HUANG TAI-CHUN;YAO CHIH-HSIANG;CHI KUAN-SHOU |
分类号 |
F16L21/04;H01L23/00;H01L23/58;(IPC1-7):F16L21/04 |
主分类号 |
F16L21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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