发明名称 Non-repeated and non-uniform width seal ring structure
摘要 A method of forming an improved seal ring structure is described. A continuous metal seal ring is formed along a perimeter of a die wherein the metal seal ring is parallel to the edges of the die and sloped at the corner of the die so as not to have a sharp corner and wherein the metal seal ring has a first width at the corners and a second width along the edges wherein the first width is wider than the second width.
申请公布号 US2005179213(A1) 申请公布日期 2005.08.18
申请号 US20040780512 申请日期 2004.02.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO. 发明人 HUANG TAI-CHUN;YAO CHIH-HSIANG;CHI KUAN-SHOU
分类号 F16L21/04;H01L23/00;H01L23/58;(IPC1-7):F16L21/04 主分类号 F16L21/04
代理机构 代理人
主权项
地址