| 摘要 |
A probe system according to the present invention includes a probe unit and a loader unit which are adjacent to each other. The probe unit has a case defining a prober chamber for receiving an object to be tested, and a contact probe for testing the object received into the prober chamber. The loader unit has a case defining a loader chamber partially communicated with the prober chamber, and a carrying mechanism for carrying the object between the prober chamber and the loader chamber. In the loader unit, a main shielding cover for covering the carrying mechanism in the loader chamber is provided. The probe system is provided with means for supplying dry air into the interior of the main shielding cover of the loader unit and the prober chamber.
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