Flow control device

摘要

In a servo controller 3a, it is confirmed whether or not the voltages from amplifiers G1 through G3 are within the range of normal performance in the comparators 32a through 32c after alternating current voltages generated individually in a primary coil 22a and secondary coils 23a and 24a of an LVDT 2a are converted into direct current voltages and output from the amplifiers G1 though G3. When a voltage out of the range of normal performance is confirmed in at least one of the comparators 32a through 32c and a high voltage is output, the servo controller 3a is brought into a stand-by state.