| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring probe having an approximately constant contact pressure regardless of displacement of a movable part to a bearing. SOLUTION: This measuring probe 100 is constituted of an air static pressure bearing 101, a slide shaft 102 movable in the Z-direction without a frictional resistance by the air static pressure bearing 101, a stylus 103 mounted on the lower end of the slide shaft 102, a linear scale 104 and a mirror 105 mounted on the upper end of the slide shaft 102, a ball 107 filled with helium gas 108 lighter than the air, a plate 106 for connecting the slide shaft 102 to the ball 107, a detection head 109 for detecting displacement in the Z-direction of the linear scale 104, and a base 110 for holding the air static pressure bearing 101 and the detection head 109. The stylus 103 has a tip ball in contact with the surface to be measured 112 on the tip. COPYRIGHT: (C)2005,JPO&NCIPI
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