| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from being smeared without reducing a wafer production efficiency in an annealing treatment. SOLUTION: An integrated vertical type boat 3, a stage 4 and a table 5 are freely protrudably and retractably in a process tube 10. The table 5 is mounted in a table mounting part 6. Further, a short tube 15 of smaller diameter tube type than the process tube 10 is disposed to surround the table 5 and detachably provided in the table mounting part 6. That is, the vertical type boat 3, the stage 4, the table 5, the table mounting part 6 and the short tube 15 are integrated. When this short tube 15 is housed together with the vertical type boat 3, etc. in the process tube 10, the inner wall surface of the process tube 10 is covered with the short tube 15. COPYRIGHT: (C)2005,JPO&NCIPI
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