FLUIDIC MEMS DEVICE

摘要

A fluidic micro electro-mechanical system (MEMS) device (200) is described. At least one at least partially covered fluidic channel (124) is formed on a polymer layer (42) deposited on a substrate (120). In one aspect, the partially covered fluidic channel (124) is fabricated as a unitary structure. In one implementation a strong exposure process (706) is applied to the polymer layer (42) to create a deep cross-linked polymer region (620). A weak exposure process (708) is applied to the polymer layer (42) to create a shallow cross-linked polymer region (622).