METHOD FOR FABRICATING A NITRIDE FILM,申请号KR20020009900-传众专利搜索

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发明名称	METHOD FOR FABRICATING A NITRIDE FILM
摘要
申请公布号	KR100508141(B1)	申请公布日期	2005.08.11
申请号	KR20020009900	申请日期	2002.02.25
申请人		发明人
分类号	C23C16/34;H01L33/00;C30B25/02;H01L21/20;H01L21/205;H01L33/32;H01S5/323;(IPC1-7):H01L33/00	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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