摘要 |
PROBLEM TO BE SOLVED: To provide a radiation image sensor mounted surely on a mount substrate to be fixed while securing a planarity in a relatively wide area of an image sensor part, and a manufacturing method therefor. SOLUTION: A through hole 21 is provided in the mount substrate 20 to be penetrate through from surface to a reverse face. When the image sensor part 1 is mounted on the mount substrate 20 to be fixed by an adhesive 30, pressures of spaces 60, 61 on a surface side (mounting face side) and a reverse face side in the mount substrate 20 are differed to make the pressure get high in the surface side. An atmospheric pressure difference is generated thereby between the surface and the reverse face of the image sensor part 1 through the through hole 21, the image sensor part 1 is pressed onto the mount substrate 20 using the atmospheric pressure difference, and the adhesive 30 is cured for the fixation. COPYRIGHT: (C)2005,JPO&NCIPI
|