CLEANING FLUID AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cleaning fluid, and to provide a cleaning method having advantages as follows: (1) treatment is possible at room temperature without conducting heating; (2) amounts of a chemical and water to be used are small; (3) use of a specific device is not required; and (4) use of a specific chemical is not required.

SOLUTION: This cleaning fluid contains 20-100 ppb of oxygen in electrolytic ionic water containing OH-. The cleaning method comprises conducting cleaning of a material to be cleaned while applying ultrasonic waves having a frequency of ≥30 kHz to the cleaning fluid which contains 20-100 ppb of the oxygen in the electrolytic ionic water containing the OH-.

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