| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a data processing method and a data processing apparatus, by which efficient graphic computing processing can be carried out, without being influenced by the density of input pattern data. <P>SOLUTION: The data processing method for processing the layout data of a semiconductor includes the steps of dividing the layout data into temporary dispersion units in a first number and combining the temporary dispersion units in the first number to create dispersion units in a second number smaller than the first number. In the method, the data amount of the dispersion units are equalized, by combining the first temporary dispersion units, in such a manner that the variance in the data amount contained in each of the dispersion units in the second number is smaller than the variance in the data amount contained in each region, when the layout data is divided into regions of the same region in the second number. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
