CONTAMINANT REMOVING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a contaminant removing apparatus capable of suppressing the propagation of bacteria and reducing the cost.

SOLUTION: An air washer 50 introduces air to be treated (25°C) from a clean room. Spray nozzles 51a to 54a are provided to the air washer 50. A circulation water replenishing tank 55 is divided into a first circulation water replenishing tank 55a and a second circulation water replenishing tank 55b. The air to be treated passes through an eliminator 69 and the mist of spray water is removed therefrom. The air further flows into an air conditioned chamber 60 at a low temperature of 12°C. Replenishing water (pure water) is directly supplied to the air washer without passing the circulation water replenishing tank 55 and is emitted into the air to be treated from the spray nozzle 54a.

COPYRIGHT: (C)2005,JPO&NCIPI